CV


FA
Bahram Azizollah-Ganji

Bahram Azizollah-Ganji

Professor

College: Electrical & Computer Engineering

Department: Electronics

CV
FA
Bahram Azizollah-Ganji

Professor Bahram Azizollah-Ganji

College: Electrical & Computer Engineering - Department: Electronics

Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer

AuthorsBahram Azizollah-Ganji, Sedighe Babaei sedaghat, Alberto Roncaglia, Luca Belsito
JournalSOLID-STATE ELECTRONICS
Published At۲۰۱۸

Abstract