High performance Novel MEMS Capacitive Microphone With supported perforated diaphragm by frog arms

Professor

College: Electrical & Computer Engineering

Department: Electronics

College: Electrical & Computer Engineering - Department: Electronics

Authors	Sedighe Babaei sedaghat, Bahram Azizollah-Ganji
Conference Title	25th Iranian Conference on Electrical Engineering (ICEE2017)
Holding Date of Conference	۲۰۱۷
Event Place	Iran